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TAKAHATA K.
T/K
ยท
Takahata, Naoyuki Klein
title
ISBN-13
(ISBN-10)
year of publication
Advances In Micro/Nano Electromechanical Systems And Fabrication Technologies
978-953-51-1O85-9
(953-51-1O85-3)
2014
Takahide Kurokawa