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TaiRan Hsu
title
ISBN-13
(ISBN-10)
year of publication
MEMS and Microsystems: Design, Manufacture, and Nanoscale Engineering
978-O-47O-O83O1-7
(O-47O-O83O1-8)
2008
T.H.
·
Tarnio Hayashi
·
Teruno Higa
Tais Helena Lintz - Photos by Stella L. De Magalh