Makabe T. · T. M · Tomoko Makabe · Toshiaki Makabe
title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
---|---|---|---|
Advances in Low Temperature RF Plasmas. Basis for Process Design | 978-0-444-51095-2 (0-444-51095-8) | 2002 | |
Plasma Electronics: Applications in Microelectronic Device Fabrication | 978-0-7503-0976-9 (0-7503-0976-8) | 2006 | Z. Petrovic |