T. Makabe

Makabe T. · T. M · Tomoko Makabe · Toshiaki Makabe

CRC Press · Elsevier Science

titleISBN-13
(ISBN-10)
year of publica-
tion
other author(s)
Advances in Low Temperature RF Plasmas. Basis for Process Design978-0-444-51095-2
(0-444-51095-8)
2002
Plasma Electronics: Applications in Microelectronic Device Fabrication978-0-7503-0976-9
(0-7503-0976-8)
2006Z. Petrovic

 

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