Electrochemical Society · Springer
Titel | ISBN-13 (ISBN-10) | Erschei- nungsjahr | andere Autoren | |
---|---|---|---|---|
Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing; Proceedings: Int'l Symposium on Semiconductor Cleaning and Surface | 978-1-56677-568-7 (1-56677-568-X) | 2007 | ||
Ultraclean Surface Processing of Silicon Wafers: Secrects of VLSI Manufacturing | 978-3-642-08272-6 (3-642-08272-6) | 2010 | Takeshi Hattori · S. Heusler · J.P. Webb | |
Ultraclean Surface Processing of Silicon Wafers: Secrets of VLSI Manufacturing | 978-3-540-61672-6 (3-540-61672-1) | 1998 | Takeshi Hattori · S. Heusler · J.P. Webb |
T.H. · Takaaki Hattori · Takeshi Hattori · Tamaki Hattori · Tomokazu Hattori · Tsutomu Hattori