| title | ISBN-13 | year of publica- tion | other author(s) |
|---|---|---|---|
| Advanced Metallizations in Microelectronics: Volume 181 | 978-1-107-41017-6 | 2014 | Avishay Katz · Ami Appelbaum |
| Chemical Mechanical Planarization of Microelectronic Materials | 978-0-471-13827-3 | 1997 | Joseph M. Steigerwald · Ronald J. Gutmann |
| Electromigration and Stress Voiding | 978-0-471-04058-3 | 2004 | |
| Electronic Materials: Science and Technology | 978-0-12-511120-1 | 1989 | Martin C. Peckerar |
| Handbook of Materials for Microelectronics | 978-0-471-29820-5 | 2011 | Paul Chow |
| Silicides for VLSI Applications | 978-0-12-511220-8 | 1983 | |
P.M. · S M · S Murarka · S P · Shyam P.
Academic Press · Cambridge University Press · Wiley