Matsui Shinji · S M · S. Matsui
| title | media type | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|---|
| Materials Issues and Modeling for Device Nanofabrication: Volume 584 | Paperback | 978-1-107-41417-4 (1-107-41417-2) | 2014 | Lhadi Merhari · Luc T. Wille · Kenneth E. Gonsalves · Mark F. Gyure · Lloyd J. Whitman |
| Sub-Half-Micron Lithography for ULSIs | " | 978-0-521-02234-7 (0-521-02234-7) | 2005 | Katsumi Suzuki · Yukinori Ochiai |
| Sub-Half-Micron Lithography for ULSIs | Hardcover | 978-0-521-57080-0 (0-521-57080-8) | 2000 | Katsumi Suzuki · Yukinori Ochiai |