| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Chemical Mechanical Polishing in Silicon Processing: Semiconductors and Semimetals Volume 63 | 978-0-12-401493-0 (0-12-401493-3) | 2011 | |
| Chemical Mechanical Polishing in Silicon Processing, Volume 63 | 978-0-12-752172-5 (0-12-752172-0) | 1999 | Robert O. Miller |
H. Li · S H · S. L. · S. Li · Shin M. Hwa Li