| title | ISBN-13 (ISBN-10) | year of publication |
|---|---|---|
| 2nd International Extreme Ultra-violet Lithography Symposium 2003 | 978-1-60423-679-8 (1-60423-679-5) | 2007 |
| 4th International Extreme Ultra-violet Lithography Symposium 2005 | 978-1-60423-680-4 (1-60423-680-9) | 2007 |
| 5th International Symposium 2006 | 978-1-60423-741-2 (1-60423-741-4) | 2007 |