| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Design, Test, and Microfabrication of Mems and Moems: 30 March-1 April 1999, Paris, France | 978-O-8194-3154-7 (O-8194-3154-O) | 1999 | Bernard Bourtois · Wolfgang Ehrfeld · Hiroyuki Fujita · Jean-Michel Karam · Karen W. Markus · Bernard Courtois |