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Sandia National Laboratories
title
ISBN-13
(ISBN-10)
year of publication
Reliability, Packaging, Testing, And Characteriza-tion of Mems/moems IV
978-O-8194-569O-8
(O-8194-569O-X)
2005
S. L.
·
[s.n.]
·
Sandia Laboratories
Sándor Nagy