| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) | |
|---|---|---|---|---|
| Microlithography Fundamentals in Semiconductor Devices and Fabrication Technology | 978-0-8247-9951-9 (0-8247-9951-8) | 1998 | Ueno Takumi · Toshio Ito | |
| Polymers for Microelectronics - Science and Technology: Proceedings of the International Symposium on "Polymers for Microelectronics - Science and ... 2, 1989): International Symposium Proceedings | 978-3-527-28168-8 (3-527-28168-1) | 1990 | Yoneho Tabata · Itaru Mita · Kazuyuki Horie · Seiichi Tagawa |