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> S. J. Yakura
S. J. Yakura
title
ISBN-13
(ISBN-10)
year of publication
IEEE Micro Electro Mechanical Systems: Proceedings 1994: Oiso, Japan January 25-28, 1994/94Ch3404-1
978-O-78O3-1833-5
(O-78O3-1833-1)
1994
J. Y
·
S.J.
·
S.Y.
S.J. Yang