Rolf Claessen

TitelISBN-13
(ISBN-10)
Erscheinungsjahr
Understanding Key Molecular Properties in a CVD Process Feasibility Study: Design of Volatile Non-halogenated Precursors for the Chemical Vapor Deposition of Copper978-3-8311-4274-3
(3-8311-4274-2)
2002

R. C. · Rolf Classon · Rolf U Claessen

Rolf Classon