| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Handbook of Semiconductor Manufacturing Technology | 978-1-57444-675-3 (1-57444-675-4) | 2007 | Yoshio Nishi |
| Handbook of Semiconductor Manufacturing Technology | 978-0-8247-8783-7 (0-8247-8783-8) | 2000 | " |