| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Silicon Processing for the VLSI Era, Vol. 1: Process Technology | 978-0-9616721-6-4 (0-9616721-6-1) | 1999 | Stanley Wolf |
| Silicon Processing for the VLSI Era, Vol. 1: Process Technology | 978-0-9616721-3-3 (0-9616721-3-7) | 1986 | " |
| Silicon Processing for the VLSI Era, Vol. 2: Process Integration | 978-0-9616721-4-0 (0-9616721-4-5) | 1990 | " |
R.N. · R. T. · R. Tauber · Richard N. · Richard T.