| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Handbook for Cleaning for Semiconductor Manufacturing: Fundamentals and Applications | 978-O-47O-62595-8 (O-47O-62595-3) | 2011 | Karen A. Reinhardt |
R. F. · R.R. · R. Reidy · Richard F. · Richard R