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Society of Photo Optical
> Richard C. Kullberg
Richard C. Kullberg
title
ISBN-13
(ISBN-10)
year of publication
Reliability, Packaging, Testing, and Characterization of Mems/moems and Nanodevices IX
978-O-8194-7988-4
(O-8194-7988-8)
2010
C. K.
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R. C.
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R.K.
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Richard C.
Richard. C. L. Matthews