| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Silicon Nitride, Silicon Dioxide, and Emerging Dielectrics; Proceedings: International Symposium on Silicon Nitride and Silicon Dioxide Thin Insulatin | 978-1-56677-552-6 (1-56677-552-3) | 2007 | |
| Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Other Emerging Dielectrics VIII 2005 | 978-1-56677-459-8 (1-56677-459-4) | 2005 | M. J. Deen · J. F. Zhang · J. Yota · Y. Kamakura |