| Titel | ISBN-13 (ISBN-10) | Erscheinungsjahr |
|---|---|---|
| Sensor-based Modeling and Monitoring of Chemical Mechanical Polishing: Analysis of Experimental Sensor Data Integrating Statistical Time Series Analysis and Nonlinear Dynamics Paradigms | 978-3-639-O3564-3 (3-639-O3564-X) | 2008 |