| title | ISBN-13 | year of publica- tion | other author(s) |
|---|---|---|---|
| Handbook of Microlithography, Micromachining, and Microfabrication: v.2: Vol 2 | 978-0-85296-911-3 | 1997 | |
| Handbook of Microlithography, Micromachining, and Microfabrication: Vol 1 & 2 (IEE Materials & Devices): Vol 1 & 2 PBED012A AND B | 978-0-85296-910-6 | 1997 | |
| High Purity Silicon V. | 978-1-56677-207-5 | 1999 | C. L. Claeys · M. Watanabe · P. Stalhofer · H. J. Dawson |
| Proceedings of the Electrochemical Society Symposium on Diagnostic Techniques for Semiconductor Materials and Devices | 978-0-8194-2765-6 | 1997 | J. L. Benton · Dieter K. Schroder · T. J. Shaffner |
Electrochemical Society · Institution of Engineering and Technology · Society of Photo Optical