| Titel | ISBN-13 (ISBN-10) | Erschei- nungsjahr | andere Autoren |
|---|---|---|---|
| EMLC 2006-22nd European Mask and Lithography Conference EMLC: Lectures held at the GMM-Conference January 23-26, 2006 in Dresden, Germany | 978-3-8007-2931-9 (3-8007-2931-8) | 2006 | |
| EMLC 2007: 23rd European Mask and Lithography Conference, Lectures held at the GMM Conference January 22 - 26, 2007 in Grenoble, France, Proceedings of SPIE in cooperation with VDE/VDI/ GMM | 978-3-8007-3032-2 (3-8007-3032-4) | 2007 | |
| ICPT 2007: International Conference on Planarization/CMP Technology, October 25 - 27, 2007 Dresden, Germany, Proceedings | 978-3-8007-3065-0 (3-8007-3065-0) | 2007 | Fraunhofer Insitute for Silicon Technology (ISIT) |
A. E. · A. P. · M.A. · M.E · M P · P.E.
Micro- and Precision Engineering VDI-Society Microelectronics