| title | ISBN-13 (ISBN-10) | year of publication |
|---|---|---|
| Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors V: 24-25 August 2011, San Diego, California, United States | 978-0-8194-8715-5 (0-8194-8715-5) | 2011 |
| Integrated Circuit Metrology, Inspection, and Process Control VI: 9-11 March 1992 San Jose, California | 978-0-8194-0828-0 (0-8194-0828-X) | 1992 |
M.P. · M. T. · Michael P. · Michael T · T.P