| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Materials Issues and Modeling for Device Nanofabrication: Volume 584 | 978-1-1O7-41417-4 (1-1O7-41417-2) | 2014 | Lhadi Merhari · Luc T. Wille · Kenneth E. Gonsalves · Shinji Matsui · Lloyd J. Whitman |