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Academic Press
> M. L. Hitchman
M. L. Hitchman
title
ISBN-13
(ISBN-10)
year of publica-
tion
other author(s)
Chemical Vapor Deposition: Principles and Applications
978-O-12-34967O-6
(O-12-34967O-5)
1993
K. F. Jensen
L -H
·
M. H.
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M.-L.
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Michael L. Hitchman
M. L. Hoffmann