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Liguo Chen
L. C.
·
L. Chen
title
ISBN-13
(ISBN-10)
year of publica-
tion
other author(s)
Measurement Technology for Micro-Nanometer Devices
978-1-118-71796-7
(1-118-71796-1)
2017
Wendong Zhang · Xiujian Chou · Tielin Shi · Zongmin Ma · Haifei Bao · Jingdong Chen · Dachao Li
Liguori/Carroll-Cobb