title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
---|---|---|---|
Cyrstalline Defects and Contamination: Their Impact and Control in Device Manufacturing IV - DECON 2005 | 978-1-56677-428-4 (1-56677-428-4) | 2005 | Bernd O. Kolbesen · Cor Claeys · Francois Tardif |
L. Fabry · László Fábry · Lucile Favier