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> Kyuyoung Heo
Kyuyoung Heo
title
ISBN-13
(ISBN-10)
year of publica-
tion
other author(s)
Low-k Nanoporous Interdielectrics: Materials, Thin Film Fabrications, Structures and Properties
978-1-61668-749-6
(1-61668-749-5)
2010
Moonhor Ree · Jinhwan Yoon
K. H.
·
Kang Hu
·
KNOKE H.
·
Kueng H
K.I. Abaladze