title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
---|---|---|---|
22nd Annual Bacus Symposium on Photomask Technology | 978-0-8194-4675-6 (0-8194-4675-0) | 2002 | Brian J. Grenon |
23rd Annual Bacus Symposium on Photomask Technology | 978-0-8194-5143-9 (0-8194-5143-6) | 2003 |