title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
---|---|---|---|
Ion Implantation and Plasma Assisted Processes: Proceedings of the Conference on Ion Implantation and Plasma Assisted Processes for Industrial Appli | 978-O-8717O-33O-9 (O-8717O-33O-O) | 1989 | Robert F. Hochman · Hillary Solnick-Legg |