Kazuo Maruyama

K&M · K. Maruyama

titleISBN-13
(ISBN-10)
year of publica-
tion
other author(s)
Nanotechnology: Integrated Processing Systems for Ultra-precision and Ultra-fine Products978-O-19-856283-2
(O-19-856283-7)
1996Norio Taniguchi · Tsuguo Kohno · Kiyoshi Iizuka · Iwao Miyamoto · Toshio Dohi

Kazuo Matsuzaka