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Julius J. Muray
J J
ยท
J.M.
title
ISBN-13
(ISBN-10)
year of publica-
tion
other author(s)
The Physics of Microfabrication
978-O-3O6-4O863-2
(O-3O6-4O863-5)
1982
Ivor Brodie
Julius J. Nam