| Titel | ISBN-13 (ISBN-10) | Erscheinungsjahr |
|---|---|---|
| Development and Assessment of Wafer Transport Sequencing Rules for Clustertools: Development of Sequencing Rules for Clustertools by Means of Dynamic Tool Simulation | 978-3-639-O3254-3 (3-639-O3254-3) | 2008 |
D B · Daniel B. · J.B. · J.D. · J. Daniel · József Benke · József Dániel