| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Chemical Mechanical Planarization of Microelectronic Materials | 978-O-471-13827-3 (O-471-13827-4) | 1997 | Shyam P. Murarka · Ronald J. Gutmann |
J.M. · J.M. Steigerwald · J. S. · J. Steigerwald · Joseph M. · Joseph S. · M S.