Titel | Art | ISBN-13 (ISBN-10) | Erscheinungsjahr |
---|---|---|---|
Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures | Taschenbuch | 978-3-642-06048-9 (3-642-06048-X) | 2010 |
Shape and Functional Elements of the Bulk Silicon Microtechnique: A Manual of Wet-Etched Silicon Structures | Gebunden | 978-3-540-22109-8 (3-540-22109-3) | 2004 |