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Jihong Choi

J C · J. Choi

TitelISBN-13
(ISBN-10)		Erscheinungsjahr
Process Modeling of Chemical Mechanical Planarization: An Integrated Model from Abrasive Scale to Chip Scale; Basics, Characterizations, Modeling and Verification978-3-639-OO166-2
(3-639-OO166-4)		2008

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