Jianfeng Luo

TitelISBN-13
(ISBN-10)
Erschei-
nungsjahr
andere Autoren
Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication:: From Particle Scale to Feature, Die and Wafer Scales978-3-642-06115-8
(3-642-06115-X)
2010
Integrated Modeling of Chemical Mechanical Planarization for Sub-Micron IC Fabrication: From Particle Scale to Feature, Die and Wafer Scales978-3-540-22369-6
(3-540-22369-X)
2004David A. Dornfeld

J. L. · Jianbang Liu · Jianbin Luo · Jianfeng Lu · Jianping Li · Jianping Liu · Jinfeng Liao · Jinfeng Liu · Junfang Li

JIANG LE XING