Academic Press · William Andrew
| title | media type | ISBN-13 (ISBN-10) | year of publication |
|---|---|---|---|
| Sputtering Materials for VLSI and Thin Film Devices | Paperback | 978-0-12-810080-6 (0-12-810080-X) | 2018 |
| Sputtering Materials for VLSI and Thin Film Devices | Hardcover | 978-0-8155-1593-7 (0-8155-1593-6) | 2013 |