title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
---|---|---|---|
Laser Applications in Microelectronic and Optoelectronic Manufacturing IV: 25-27 January 1999, San Jose, California | 978-0-8194-3088-5 (0-8194-3088-9) | 1999 | Henry Helvajian · Ernst W. Kreutz · Koji Sugioka |
Photon Processing in Microelectronics and Photonics II: Proceedings of SPIE 27-30 January 2003, San Jose, California, USA | 978-0-8194-4777-7 (0-8194-4777-3) | 2003 | Alberto Pique · Koji Sugioka · Peter R. Herman · Jim Fieret · Willem Hoving · Kunihiko Washio · David B. Geohegan |