J. Yota

J. Y

titleISBN-13
(ISBN-10)
year of publica-
tion
other author(s)
Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Other Emerging Dielectrics VIII 2005978-1-56677-459-8
(1-56677-459-4)
2005R. E. Sah · M. J. Deen · J. F. Zhang · Y. Kamakura

J. Young