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J. Yota
J. Y
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(ISBN-10)
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Silicon Nitride, Silicon Dioxide Thin Insulating Films, and Other Emerging Dielectrics VIII 2005
978-1-56677-459-8
(1-56677-459-4)
2005
R. E. Sah · M. J. Deen · J. F. Zhang · Y. Kamakura
J. Young