| title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
|---|---|---|---|
| Chemical Mechanical Planarization of Microelectronic Materials | 978-O-471-13827-3 (O-471-13827-4) | 1997 | Shyam P. · Murarka Gutmann · Ronald J. Gutmann |
J.M. · J. S. · J. Steigerwald · Joseph M. Steigerwald · M S.