| title | ISBN-13 (ISBN-10) | year of publication |
|---|---|---|
| Proceedings of the Issm2000: The Ninth International Symposium on Semiconductor Manufacturing September 26-28, 2000 Hotel East 21 Tokyo Tokyo, Japan | 978-O-78O3-64O5-9 (O-78O3-64O5-8) | 2000 |
I.S.O. · International Symposium · O's · S.O. · S S