| title | ISBN-13 (ISBN-10) | year of publication |
|---|---|---|
| Emerging Lithographic Technologies VII: 25-27 February, 2003, Santa Clara, California, USA | 978-0-8194-4842-2 (0-8194-4842-7) | 2003 |
| Emerging Lithographic Technologies X: 21-23 February, 2006, San Jose, California, USA | 978-0-8194-6194-0 (0-8194-6194-6) | 2006 |