| title | ISBN-13 (ISBN-10) | year of publication |
|---|---|---|
| 2000 Ieee/Semi Advanced Semiconductor Manufacturing Conference and Workshop: Asmc 2000 Proceedings | 978-0-7803-5921-5 (0-7803-5921-6) | 2000 |
| 2002 Ieee/Semi Advanced Semiconductor Manufacturing Conference and Workshop: Boston, Massachusetts, Usa, April 30-May 2, 2002 | 978-0-7803-7158-3 (0-7803-7158-5) | 2002 |
| Semiconductor Manufacturing Technology Workshop: 2000 | 978-0-7803-6374-8 (0-7803-6374-4) | 2001 |