I.C. ยท International Conference
title | ISBN-13 (ISBN-10) | year of publication |
---|---|---|
The Thirteenth Annual International Conference on Micro Electro Mechanical Systems, IEEE, 2000 | 978-O-78O3-5273-5 (O-78O3-5273-4) | 2000 |
IEEE International Conference on Microelectronic Test Structures