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Artech House Publishers
> Graham Ensel
Graham Ensel
title
ISBN-13
(ISBN-10)
year of publica-
tion
other author(s)
MEMS Mechanical Sensors
978-1-58O53-536-6
(1-58O53-536-4)
2004
Steve P. Beeby · Michael Kraft
G.E
·
Göran Englund
·
Goran Englund
·
Graham English
Graham et al