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Cambridge University Press
> G. S. Oehrlein
G. S. Oehrlein
title
ISBN-13
(ISBN-10)
year of publication
Materials, Technology and Reliability for Advanced Interconnects and LowK Dielectrics: Volume 612
978-1-1O7-41315-3
(1-1O7-41315-X)
2014
G.O.
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G S
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S.O.
G.S. Ositelu