| title | ISBN-13 (ISBN-10) | year of publication | |
|---|---|---|---|
| LPCVD Silicon Nitride and Oxynitride Films. Material and Applications in Integrated Circuit Technology | 978-3-540-53954-4 (3-540-53954-9) | 1991 | |
| Lpcvd Silicon Nitride and Oxynitride Films: Materials and Applications in Integrated Circuit Technology | 978-0-387-53954-6 (0-387-53954-9) | 1991 |