title | ISBN-13 (ISBN-10) | year of publica- tion | other author(s) |
---|---|---|---|
Laser Applications in Microelectronic and Optoelectronic Manufacturing IV: 25-27 January 1999, San Jose, California | 978-O-8194-3O88-5 (O-8194-3O88-9) | 1999 | Jan J. Dubowski · Henry Helvajian · Koji Sugioka |