E. M. · Edda Servi Machlin · Eugene S. Machlin · S M
| title | ISBN-13 (ISBN-10) | year of publication |
|---|---|---|
| Materials Science in Microelectronics II: Volume 2 | 978-0-08-097326-5 (0-08-097326-4) | 2013 |
| Materials Science in Microelectronics, Volume 1: The Relationships Between Thin Film Processing and Structure | 978-0-08-044640-0 (0-08-044640-X) | 2005 |