| title | ISBN-13 (ISBN-10) | year of publication |
|---|---|---|
| Metrology, Inspection, and Process Control for Microlithography XVI | 978-0-8194-4435-6 (0-8194-4435-9) | 2002 |
| Metrology, Inspection, and Process Control for Microlithography XVII | 978-0-8194-4843-9 (0-8194-4843-5) | 2003 |